Comparison Study on SU-8 and Its Composites

Bhaskar Radhe Shyam

doi:doi:10.11648/j.ajae.20190602.11

| Peer-Reviewed

Comparison Study on SU-8 and Its Composites

Bhaskar Radhe Shyam

Published in American Journal of Aerospace Engineering (Volume 6, Issue 2)

Received: 20 July 2019 Accepted: 25 December 2019 Published: 8 January 2020

Views: Downloads:

Download PDF

Share This Article

Twitter
Linked In
Facebook

Abstract

In this paper, SU-8 is an industrially useful photo resist polymer for micro-fabrication because of its unique UV sensitive curing property. It is also used as a structural material for micro-machines such as micro-electro mechanical systems (MEMS). However, it has poor tribological and mechanical properties which make SU-8 inferior to Si, the mainstay MEMS material today. In this paper, we report the fabrication of SU-8 nanocomposites which are self-lubricating and have better mechanical properties. The liquid lubricant i.e., perfluoropolyether (PFPE) and nanoparticles such as SiO₂, CNTs, and graphite were added into SU-8 for this purpose. These self-lubricating SU-8 + PFPE and SU-8 + PFPE + nanoparticle composites have shown a reduction in the initial coefficient of friction, increased wear life and the mechanical properties such as the elastic modulus and the hardness have increased. We have used perfluoropolyether (PFPE) as in-situ lubricant filler to SU-8. This composite material has shown highly superior friction and wear performance over pristine SU-8 and any such alternative material for this application. We have shown that the mechanical property can also be enhanced by this method if we utilize nano-particles for further reinforcement. This self-lubricating SU-8+PFPE composite can be used for the fabrication of MEMS applications requiring no external lubrication, and also these composites can find applications in many tribological components of traditional machines. The thickness of SU-8 and its composites coating is fabricated in the range ∼100–105 ±m. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.

Published in	American Journal of Aerospace Engineering (Volume 6, Issue 2)
DOI	10.11648/j.ajae.20190602.11
Page(s)	33-38
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2020. Published by Science Publishing Group

Keywords

Su-8, Boron Nitride, Perfluoropolyether (PFPE), Self Lubrication, MEMS, Base Oil (SN-150)

References

[1]	Kim, S. H., Asay, D. B., and Dugger, M. T., “Nanotribology and MEMS”, NanoToday 2, 2007, 22-29.
[2]	Sujeet K. Sinha, Prabakaran S., Duong H. M., “SU-8 Composites for Micro-systems applications” Journal of Physics D: applied, 2013, 1-4.
[3]	Prabakaran S, Satyanarayana N and Sinha SK., “Self-lubricating SU-8 nano-composites for microelectromechanical systems applications”, Tribology Letters 49 (1), 2013, 169-178.
[4]	Anand Singh R., Jitendra S. Katiyar, Vinay K Patel, “Thermo- mechanical and tribological properties of SU-8/h-BN composites with SN 150/ perfluoropolyether (PFPE) filler” Springer 2019, 1-13.
[5]	Gelorme, J. D., Cox, R. J., and Gutierrez, S. A. R., “Photoresist composition and printed circuit Boards and packages made herewith”, US Patent 4, 882, 245, Date of Patent: Nov. 21, 1989.
[6]	Abgrall, P., Conedera, V., Camon, H., Gue, A-M., and Nguyen, N. T., “SU-8 as a structural material for labs-on-chips and microelectromechanical systems”, Electrophoresis 28, 2007, 4539-4551.
[7]	Saravanan P, Satyanarayana N, Sinha S K. Wear durability study on self-lubricating SU-8 composites with perfluoropolyther, multiply-alkylated cyclopentane and base oil as the fillers. Tribol Int 64: 103–115 (2013).
[8]	Saravanan P, Satyanarayana N, Siong P C, Duong H M, Sinha S K. Tribology of self-lubricating SU-8+PFPE composite based Lub-tape. Procedia Eng 68: 497–504 (2013).
[9]	Prabakaran Saravanan, Nalam Satyanarayana and S. K. Sinha, “Wear Durability Study on Self-lubricating SU-8 composites with perfluoropolyther, multiply-alkylated cyclopentane and base oil as the fillers”, Tribology International, 64 (2013) 103-115.
[10]	Jiguet, S., Judelewicz, M., Mischler, S., Bertch, A., and Renaud, P., “Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts”, Microelectronic Engineering 83, 2006, 1273-1276.
[11]	Marinis, T. F.: The future of microelectromechanical systems (MEMS). Strain 45, 208–220 (2009).
[12]	Kim, S. H., Asay, D. B., Dugger, M. T.: Nanotribology and MEMS. NanoToday 2, 22–29 (2007).
[13]	de Boer, M. P., Mayer, T. M.: Tribology of MEMS. MRS Bull. 4, 302–304 (2001).
[14]	Lee, K. K., Bhushan, B., Hansford, D.: Nanotribological characterization of fluoropolymer thin films for biomedical micro/ nanoelectromechanical system applications. J. Vac. Sci. Technol. A 23, 804–810 (2005).
[15]	Gelorme, J. D., Cox, R. J., Gutierrez, S. A. R.: Photoresist composition and printed circuit boards and packages made herewith. US Patent 4, 882, 245, 21 Nov 1989 6. Abgrall, P., Conedera, V., Camon, H., Gue, A. -M., Nguyen, N. T.: SU-8 as a structural material for labs-on-chips and microelectromechanical systems. Electrophoresis 28, 4539–4551 (2007).
[16]	Bertsch A, Renaud P. Special issue: 15 years of SU8 as MEMS material. Micromachines 6 (6): 790–792 (2015).
[17]	Steinhäuser S, Wielage B. Composite coatings: Manufacture, properties, and applications. Surf Eng 13 (4): 289–294 (1997)/
[18]	Rathaur A S, Katiyar J K, Patel V K, Bhaumik S, Sharma A K. A comparative study of tribological and mechanical properties of composite polymer coatings on bearing steel. Int J Surf Sci Eng 12 (5–6): 379–401 (2018).
[19]	Lau K H, Giridhar A, Harikrishnan S, Satyanarayana N, Sinha S K. Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates. Microsyst Technol 19 (11): 1863–1871 (2013).

Cite This Article

Plain Text BibTeX RIS

APA Style

Bhaskar Radhe Shyam. (2020). Comparison Study on SU-8 and Its Composites. American Journal of Aerospace Engineering, 6(2), 33-38. https://doi.org/10.11648/j.ajae.20190602.11

Copy | Download

ACS Style

Bhaskar Radhe Shyam. Comparison Study on SU-8 and Its Composites. Am. J. Aerosp. Eng. 2020, 6(2), 33-38. doi: 10.11648/j.ajae.20190602.11

Copy | Download

AMA Style

Bhaskar Radhe Shyam. Comparison Study on SU-8 and Its Composites. Am J Aerosp Eng. 2020;6(2):33-38. doi: 10.11648/j.ajae.20190602.11

Copy | Download

@article{10.11648/j.ajae.20190602.11,
  author = {Bhaskar Radhe Shyam},
  title = {Comparison Study on SU-8 and Its Composites},
  journal = {American Journal of Aerospace Engineering},
  volume = {6},
  number = {2},
  pages = {33-38},
  doi = {10.11648/j.ajae.20190602.11},
  url = {https://doi.org/10.11648/j.ajae.20190602.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajae.20190602.11},
  abstract = {In this paper, SU-8 is an industrially useful photo resist polymer for micro-fabrication because of its unique UV sensitive curing property. It is also used as a structural material for micro-machines such as micro-electro mechanical systems (MEMS). However, it has poor tribological and mechanical properties which make SU-8 inferior to Si, the mainstay MEMS material today. In this paper, we report the fabrication of SU-8 nanocomposites which are self-lubricating and have better mechanical properties. The liquid lubricant i.e., perfluoropolyether (PFPE) and nanoparticles such as SiO2, CNTs, and graphite were added into SU-8 for this purpose. These self-lubricating SU-8 + PFPE and SU-8 + PFPE + nanoparticle composites have shown a reduction in the initial coefficient of friction, increased wear life and the mechanical properties such as the elastic modulus and the hardness have increased. We have used perfluoropolyether (PFPE) as in-situ lubricant filler to SU-8. This composite material has shown highly superior friction and wear performance over pristine SU-8 and any such alternative material for this application. We have shown that the mechanical property can also be enhanced by this method if we utilize nano-particles for further reinforcement. This self-lubricating SU-8+PFPE composite can be used for the fabrication of MEMS applications requiring no external lubrication, and also these composites can find applications in many tribological components of traditional machines. The thickness of SU-8 and its composites coating is fabricated in the range ∼100–105 ±m. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.},
 year = {2020}
}

Copy | Download

TY - JOUR
T1 - Comparison Study on SU-8 and Its Composites
AU - Bhaskar Radhe Shyam
Y1 - 2020/01/08
PY - 2020
N1 - https://doi.org/10.11648/j.ajae.20190602.11
DO - 10.11648/j.ajae.20190602.11
T2 - American Journal of Aerospace Engineering
JF - American Journal of Aerospace Engineering
JO - American Journal of Aerospace Engineering
SP - 33
EP - 38
PB - Science Publishing Group
SN - 2376-4821
UR - https://doi.org/10.11648/j.ajae.20190602.11
AB - In this paper, SU-8 is an industrially useful photo resist polymer for micro-fabrication because of its unique UV sensitive curing property. It is also used as a structural material for micro-machines such as micro-electro mechanical systems (MEMS). However, it has poor tribological and mechanical properties which make SU-8 inferior to Si, the mainstay MEMS material today. In this paper, we report the fabrication of SU-8 nanocomposites which are self-lubricating and have better mechanical properties. The liquid lubricant i.e., perfluoropolyether (PFPE) and nanoparticles such as SiO2, CNTs, and graphite were added into SU-8 for this purpose. These self-lubricating SU-8 + PFPE and SU-8 + PFPE + nanoparticle composites have shown a reduction in the initial coefficient of friction, increased wear life and the mechanical properties such as the elastic modulus and the hardness have increased. We have used perfluoropolyether (PFPE) as in-situ lubricant filler to SU-8. This composite material has shown highly superior friction and wear performance over pristine SU-8 and any such alternative material for this application. We have shown that the mechanical property can also be enhanced by this method if we utilize nano-particles for further reinforcement. This self-lubricating SU-8+PFPE composite can be used for the fabrication of MEMS applications requiring no external lubrication, and also these composites can find applications in many tribological components of traditional machines. The thickness of SU-8 and its composites coating is fabricated in the range ∼100–105 ±m. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.
VL - 6
IS - 2
ER -

Copy | Download

Author Information

Bhaskar Radhe Shyam

Department of Mechanical Engineering, JP Engineering College, Rajpura, Meerut, India

Download PDF

Sections

Plain Text BibTeX RIS

APA Style

Bhaskar Radhe Shyam. (2020). Comparison Study on SU-8 and Its Composites. American Journal of Aerospace Engineering, 6(2), 33-38. https://doi.org/10.11648/j.ajae.20190602.11

Copy | Download

ACS Style

Bhaskar Radhe Shyam. Comparison Study on SU-8 and Its Composites. Am. J. Aerosp. Eng. 2020, 6(2), 33-38. doi: 10.11648/j.ajae.20190602.11

Copy | Download

AMA Style

Bhaskar Radhe Shyam. Comparison Study on SU-8 and Its Composites. Am J Aerosp Eng. 2020;6(2):33-38. doi: 10.11648/j.ajae.20190602.11

Copy | Download

@article{10.11648/j.ajae.20190602.11,
  author = {Bhaskar Radhe Shyam},
  title = {Comparison Study on SU-8 and Its Composites},
  journal = {American Journal of Aerospace Engineering},
  volume = {6},
  number = {2},
  pages = {33-38},
  doi = {10.11648/j.ajae.20190602.11},
  url = {https://doi.org/10.11648/j.ajae.20190602.11},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajae.20190602.11},
  abstract = {In this paper, SU-8 is an industrially useful photo resist polymer for micro-fabrication because of its unique UV sensitive curing property. It is also used as a structural material for micro-machines such as micro-electro mechanical systems (MEMS). However, it has poor tribological and mechanical properties which make SU-8 inferior to Si, the mainstay MEMS material today. In this paper, we report the fabrication of SU-8 nanocomposites which are self-lubricating and have better mechanical properties. The liquid lubricant i.e., perfluoropolyether (PFPE) and nanoparticles such as SiO2, CNTs, and graphite were added into SU-8 for this purpose. These self-lubricating SU-8 + PFPE and SU-8 + PFPE + nanoparticle composites have shown a reduction in the initial coefficient of friction, increased wear life and the mechanical properties such as the elastic modulus and the hardness have increased. We have used perfluoropolyether (PFPE) as in-situ lubricant filler to SU-8. This composite material has shown highly superior friction and wear performance over pristine SU-8 and any such alternative material for this application. We have shown that the mechanical property can also be enhanced by this method if we utilize nano-particles for further reinforcement. This self-lubricating SU-8+PFPE composite can be used for the fabrication of MEMS applications requiring no external lubrication, and also these composites can find applications in many tribological components of traditional machines. The thickness of SU-8 and its composites coating is fabricated in the range ∼100–105 ±m. Further, SU-8 and its composites are characterized by a 3D optical profilometer, atomic force microscopy, scanning electron microscopy, a thermal gravimetric analyzer, a goniometer, a hardness tester, and an optical microscope. Under a tribology test performed at different normal loads of 2, 4, and 6 N and at a constant sliding speed of 0.28 m/s. The SU-8 composite reinforced with 10 wt.% h-BN and 20 wt.% PFPE demonstrated the best thermo-mechanical and tribological properties with a nano-textured surface of high hydrophobicity.},
 year = {2020}
}

Copy | Download